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Porous silicon bulk acoustic wave resonator with integrated transducer

✍ Scribed by Gazi N Aliev, Bernhard Goller, Paul A Snow, Helge Heinrich, Biao Yuan, Robert Aigner

Book ID
119906009
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
465 KB
Volume
7
Category
Article
ISSN
1931-7573

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## Abstract In this paper, fully integrated film bulk acoustic resonators (FBARs) and filter have been designed, fabricated, and characterized by using silicon bulk micromachining technology. The fabricated resonator is comprised of aluminum nitride (AlN) piezoelectric material sandwiched by two mo