Low-Impedance VHF and UHF Capacitive Silicon Bulk Acoustic Wave Resonators—Part I: Concept and Fabrication

✍ Scribed by Pourkamali, S.; Ho, G.K.; Ayazi, F.

• Book ID: 114618840
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 748 KB
• Volume: 54
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2007.901403