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Porous silicon: A novel material for microsystems

โœ Scribed by W. Lang; P. Steiner; H. Sandmaier

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
596 KB
Volume
51
Category
Article
ISSN
0924-4247

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โœฆ Synopsis

A porous layer is generated by electrochemical dissolution of silicon in HF. This new material has some very interesting applications in microstructuring, sensorics, microelectronics and microoptics. The etching process and the morphology of porous silicon are described. Possible applications are discussed.

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