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A novel method of fabricating porous silicon

โœ Scribed by Dibyendu Chakravarty; B.V. Sarada; S.B. Chandrasekhar; K. Saravanan; T.N. Rao


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
538 KB
Volume
528
Category
Article
ISSN
0921-5093

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๐Ÿ“œ SIMILAR VOLUMES


Porous silicon: A novel material for mic
โœ W. Lang; P. Steiner; H. Sandmaier ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 596 KB

A porous layer is generated by electrochemical dissolution of silicon in HF. This new material has some very interesting applications in microstructuring, sensorics, microelectronics and microoptics. The etching process and the morphology of porous silicon are described. Possible applications are di