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Polysilicon dry etching by a large-area electron beam

✍ Scribed by Y. C. Du; H. Wang; D. C. Sun; F. M. Li

Book ID: 110557824
Publisher: Springer
Year: 1988
Tongue: English
Weight: 263 KB
Volume: 45
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf02565205

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