Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching

✍ Scribed by C. H. Liu; M. H. Hong; M. C. Lum; H. Flotow; F. Ghadessy; J. B. Zhang

• Publisher: Springer
• Year: 2010
• Tongue: English
• Weight: 510 KB
• Volume: 101
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-010-5807-9