Polyoxide thinning limitation and superior ONO interpoly dielectric for nonvolatile memory devices

✍ Scribed by Mori, S.; Arai, N.; Kaneko, Y.; Yoshikawa, K.

• Book ID: 114537322
• Publisher: IEEE
• Year: 1991
• Tongue: English
• Weight: 907 KB
• Volume: 38
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.69905