<br> Content: Chemical amplification mechanisms for microlithography / E. Reichmanis, F.M. Houlihan, O. Nalamasu, and T.X. Neenan --<br/> Synthesis of 4-(tert-butoxycarbonyl)-2,6-dinitrobenzyl tosylate : a potential generator and dissolution inhibitor solubilizable through chemical amplification / F
Polymers for Microelectronics and Nanoelectronics
โ Scribed by Qinghuang Lin, Raymond A. Pearson, and Jeffrey C. Hedrick (Eds.)
- Publisher
- American Chemical Society
- Year
- 2004
- Tongue
- English
- Leaves
- 313
- Series
- ACS Symposium Series 874
- Category
- Library
No coin nor oath required. For personal study only.
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