Polymerization initiator effects on fluoropolymers for 157-nm single-layer resists

✍ Scribed by M. Toriumi; T. Ishikawa; T. Kodani; M. Koh; T. Moriya; T. Yamashita; T. Araki; H. Aoyama; T. Hagiwara; T. Furukawa; T. Itani

• Book ID: 113797598
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 187 KB
• Volume: 73-74
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.02.043