Metal-Catalyzed Vinyl Addition Polymers for 157 nm Resist Applications. 2. Fluorinated Norbornenes: Synthesis, Polymerization, and Initial Imaging Results

✍ Scribed by Tran, Hoang V.; Hung, Raymond J.; Chiba, Takashi; Yamada, Shintaro; Mrozek, Thomas; Hsieh, Yu-Tsai; Chambers, Charles R.; Osborn, Brian P.; Trinque, Brian C.; Pinnow, Matthew J.; MacDonald, Scott A.; Willson, C. Grant; Sanders, Daniel P.; Connor, Eric F.; Grubbs, Robert H.; Conley, Will

• Book ID: 120490924
• Publisher: American Chemical Society
• Year: 2002
• Tongue: English
• Weight: 388 KB
• Volume: 35
• Category: Article
• ISSN: 0024-9297
• DOI: 10.1021/ma0122371