Metal-Catalyzed Addition Polymers for 157 nm Resist Applications. Synthesis and Polymerization of Partially Fluorinated, Ester-Functionalized Tricyclo[4.2.1.0 2,5 ]non-7-enes

✍ Scribed by Sanders, Daniel P.; Connor, Eric F.; Grubbs, Robert H.; Hung, Raymond J.; Osborn, Brian P.; Chiba, Takashi; MacDonald, Scott A.; Willson, C. Grant; Conley, Will

• Book ID: 121382803
• Publisher: American Chemical Society
• Year: 2003
• Tongue: English
• Weight: 148 KB
• Volume: 36
• Category: Article
• ISSN: 0024-9297
• DOI: 10.1021/ma021131i