Polymer-like and hard amorphous hydrogenated carbon films prepared in an inductively coupled R.F. glow discharge

✍ Scribed by W. Dworschak; R. Kleber; A. Fuchs; B. Scheppat; G. Keller; K. Jung; H. Ehrhardt

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 667 KB
• Volume: 189
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(90)90454-l