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Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor

✍ Scribed by Hasenkamp, Willyan; Forchelet, David; Pataky, Kristopher; Villard, Jimmy; Lintel, Harald Van; Bertsch, Arnaud; Wang, Qing; Renaud, Philippe

Book ID: 120206980
Publisher: Springer
Year: 2012
Tongue: English
Weight: 894 KB
Volume: 14
Category: Article
ISSN: 1387-2176
DOI: 10.1007/s10544-012-9661-8

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