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SU-8 MEMS Fabry-Perot pressure sensor

✍ Scribed by G.C. Hill; R. Melamud; F.E. Declercq; A.A. Davenport; I.H. Chan; P.G. Hartwell; B.L. Pruitt

Book ID: 108262877
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 789 KB
Volume: 138
Category: Article
ISSN: 0924-4247
DOI: 10.1016/j.sna.2007.04.047

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