Polyimide surface modification by linear stationary plasma thruster

✍ Scribed by Won-Kook Choi; Dong-Hee Park

• Book ID: 104094546
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 437 KB
• Volume: 203
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2009.02.123

✦ Synopsis

Peel strength Roll-to-roll vacuum coater Polyimide

Compared to the conventional circular type, the horse-track shaped proto-type linear stationary plasma thruster (LSPT) was designed and fabricated. A cathode with LaB6 emitter was adopted for trapped electron motion along ceramic wall as an electron source generally attached in the conventional cylindrical SPT. Nevertheless it has a little lower ion beam current density of 0.5 mA/cm 2 than conventional cylindrical type SPT with 50 mm diameter, it was also proved very effective in surface modification of polymers. Reactive O 2 + and N 2 O + ion beam generated from LSPT can reduce the wetting angle 70°of polyimide (PI) down to the small angle less than 10°. 2-layer nonadhesive flexible copper clad laminate (FCCL) with Cu(8 µm)/Cu(200 nm)/Ni-Cr-Mo (20 nm)/PI(38 µm) was fabricated by using LSPT in 300 mm roll-to-roll vacuum coater. Peel strength was 0.66 kgf/cm for as-received sample and 0.42 kgf/cm after thermal test for 168 h at 150 °C, which shows a little higher performance than commercial ones.