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Polarization of eigenmodes in laser diode waveguides on semipolar and nonpolar GaN

✍ Scribed by Jens Rass; Tim Wernicke; Wolfgang G. Scheibenzuber; Ulrich T. Schwarz; Jan Kupec; Bernd Witzigmann; Patrick Vogt; Sven Einfeldt; Markus Weyers; Michael Kneissl


Book ID
112182905
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
297 KB
Volume
4
Category
Article
ISSN
1862-6254

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## Abstract Different technologies have been evaluated in order to create vertical and smooth facets for GaN‐based laser diodes on non‐ and semipolar substrates. Laser assisted scribing and cleaving proved to be a suitable method to create __c__‐, __a__‐ and __m__‐plane facets for devices grown on