Design and fabrication of resonating AT-
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H.-J. Wagner; W. Hartig; S. BΓΌttgenbach
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Article
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1994
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Elsevier Science
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English
β 441 KB
A novel design of a quartz-diaphragm pressure transducer, reahzed Hrlth an AT crystal cut, IS described The resonator consists of a bossed and grooved diaphragm structure monohthlcally attached to a quartz frame Fmlteelement modellmg has been carned out to determine the dynarmc behavlour of the stru