“Plug-up”—a new concept for fabricating SOI MEMS devices

✍ Scribed by J. Kiihamäki; J. Dekker; P. Pekko; H. Kattelus; T. Sillanpää; T. Mattila

• Book ID: 110606411
• Publisher: Springer-Verlag
• Year: 2004
• Tongue: English
• Weight: 940 KB
• Volume: 10
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/bf02637101