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PLS based dEWMA run-to-run controller for MIMO non-squared semiconductor processes

✍ Scribed by Junghui Chen; Fan Wang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Minimum entropy based run-to-run control

✍ Jianhua Zhang; Chih-Chiang Chu; Jose Munoz; Junghui Chen 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 720 KB