Minimum entropy based run-to-run control for semiconductor processes with uncertain metrology delay

✍ Scribed by Jianhua Zhang; Chih-Chiang Chu; Jose Munoz; Junghui Chen

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 720 KB
• Volume: 19
• Category: Article
• ISSN: 0959-1524
• DOI: 10.1016/j.jprocont.2009.05.004