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Plasmatron sputtering for the production of high stability NiCr resistive films

✍ Scribed by S. Schiller; U. Heisig; K. Goedicke; H. Bilz; J. Henneberger; W. Brode; W. Dietrich


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
326 KB
Volume
119
Category
Article
ISSN
0040-6090

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