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Plasma spraying using Ar-He-H2gas mixtures

✍ Scribed by S. Janisson; E. Meillot; A. Vardelle; J. F. Coudert; B. Pateyron; P. Fauchais


Book ID
111787188
Publisher
Springer US
Year
1999
Tongue
English
Weight
120 KB
Volume
8
Category
Article
ISSN
1059-9630

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## Abstract Boron nitride (BN) films with high crystallinity and phase purity (>80 %) in the cubic phase were synthesized over large areas using fluorine chemistry and electron–cyclotron resonance (ECR) microwave plasma. Plasma‐enhanced fluorine chemistry was provided by a complex H~2~–BF~3~–N~2~–A