✦ LIBER ✦

Plasma spectroscopy control and analysis of a-Si:H deposition

✍ Scribed by A. Matsuda; K. Nakagawa; K. Tanaka; M. Matsumura; S. Yamasaki; H. Okushi; S. Iizima

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Control of a-Si:H deposition by the ion

✍ M. Heintze; R. Zedlitz 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 277 KB

Post-deposition oxygen plasma treatment

✍ P. Danesh 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 157 KB

Emission spectroscopy of glow-discharge

📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 149 KB

Deposition of aSi:H using a supersonica

✍ GJ Meeusen; Z Qing; ATM Wibers; CJ Timmermans; DC Schram 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 242 KB

Electron cyclotron resonance microwave p

✍ Y.H. Shing; F.S. Pool 📂 Article 📅 1991 🏛 Elsevier Science ⚖ 547 KB

Electron cyclotron resonance deposition

✍ Y.H. Shing 📂 Article 📅 1989 🏛 Elsevier Science ⚖ 515 KB