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Plasma source ion implantation: A new approach to ion beam modification of materials

✍ Scribed by J.R. Conrad

Book ID: 108025265
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 607 KB
Volume: 116
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(89)90146-9

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