Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials

✍ Scribed by J.R. Conrad; R.A. Dodd; F.J. Worzala; X. Qiu

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 734 KB
• Volume: 36
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(88)90033-3