Plasma-polymerized electron beam resists prepared from methyl methacrylate using various carrier gases

✍ Scribed by S.A Gangal; M Hori; S Morita; S Hattori

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 422 KB
• Volume: 149
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(87)90397-x