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Plasma polymerization. VII. An esca investigation of the RF plasma polymerization of perfluorobenzene and perfluorobenzene/hydrogen mixtures

✍ Scribed by Clark, D. T. ;Abrahman, M. Z.

Book ID: 105333937
Publisher: John Wiley and Sons
Year: 1982
Weight: 605 KB
Volume: 20
Category: Article
ISSN: 0360-6376
DOI: 10.1002/pol.1982.170200706

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✦ Synopsis

Abstract

The composition and gross structural features of plasma polymers formed in the glow regions of an inductively coupled RF plasma with perfluorobenzene and perfluorobenzene/hydrogen mixtures were investigated by ESCA as a function of the operating parameters. The carbon‐to‐fluorine stoichiometries of the perfluorobenzene polymers are similar and close to those of the starting material but not of the polymers derived from perfluorobenzene/hydrogen mixtures. The rate of film deposition is dependent on the W/FM parameter. Angular and photon energy‐dependent studies confirm the vertical homogeneity of the plasma polymer films investigated.

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