## Abstract The composition and gross structural features of plasma polymers formed in the glow regions of an inductively coupled RF plasma with perfluorobenzene and perfluorobenzene/hydrogen mixtures were investigated by ESCA as a function of the operating parameters. The carbonβtoβfluorine stoich
β¦ LIBER β¦
An ESCA investigation of the inductively coupled RF plasma polymerization of fluoronaphthalene and fluoronaphthalene/hydrogen mixtures
β Scribed by Munro, H. S. ;Till, C.
- Book ID
- 105335875
- Publisher
- John Wiley and Sons
- Year
- 1985
- Weight
- 628 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0360-6376
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