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Plasma polymerization of trimethylsilane in cascade arc discharge

โœ Scribed by Y.-S. Lin; H. K. Yasuda

Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
394 KB
Volume
66
Category
Article
ISSN
0021-8995

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โœฆ Synopsis

Plasma polymerization of trimethylsilane (TMS) in cascade arc discharge was experimentally investigated. It was found that the deposition rates of methane and TMS plasma polymer were dependent on plasma parameters, and the surface characteristics of plasma polymer were also dependent on plasma variables. The following plasma variables were studied: arc current, argon flow rate, TMS flow rate, chamber pressure, substrate axial, and radial positions. Carbon, silicon, and oxygen were the main elements observed in TMS polymer films obtained by x-ray photoelectron spectroscopy (XPS). Powder-like TMS polymer films were observed by scanning electron microscopy (SEM). The size distribution of the powder-like particles was strongly dependent on deposition parameters.

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