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Plasma, polymerization in electrical discharges—III. Condensation of octamethylcyclotetrasiloxane in a silent discharge

✍ Scribed by F. Dénes; C. Ungurenasu; I. Haiduc


Book ID
107753171
Publisher
Elsevier Science
Year
1970
Tongue
English
Weight
248 KB
Volume
6
Category
Article
ISSN
0014-3057

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Plasma polymerization of trimethylsilane (TMS) in cascade arc discharge was experimentally investigated. It was found that the deposition rates of methane and TMS plasma polymer were dependent on plasma parameters, and the surface characteristics of plasma polymer were also dependent on plasma varia