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Plasma Parameters in a Pre-Ionized HiPIMS Discharge Operating at Low Pressure

โœ Scribed by Poolcharuansin, Phitsanu; Liebig, Bernd; Bradley, James


Book ID
118063447
Publisher
IEEE
Year
2010
Tongue
English
Weight
347 KB
Volume
38
Category
Article
ISSN
0093-3813

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