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Microwave plasma torch operating in a chamber at a low pressure

✍ Scribed by H. S. Uhm; S. C. Cho; Y. C. Hong

Book ID: 126111405
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 451 KB
Volume: 93
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2965459

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