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Plasma oxidation of TaSix thin films

✍ Scribed by R. Gómez-San Román; R. Pérez-Casero; J.P. Enard; J. Perrière; J.M. Martínez-Duart

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 411 KB
Volume: 53
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(91)90273-m

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