Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.
The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.Content:
Chapter 1 Introduction (pages 1โ47):
Chapter 2 What Makes Low?Temperature Plasmas a Versatile Nanotool? (pages 49โ106):
Chapter 3 Specific Examples and Practical Framework (pages 107โ144):
Chapter 4 Generation of Building and Working Units (pages 145โ198):
Chapter 5 Transport, Manipulation and Deposition of Building and Working Units (pages 145โ198):
Chapter 6 Surface Science of Plasma?Exposed Surfaces and Self?Organization Processes (pages 249โ340):
Chapter 7 Ion?Focusing Nanoscale Objects (pages 341โ413):
Chapter 8 Building and Working Units at Work (pages 415โ460):
Chapter 9 Conclusions and Outlook (pages 461โ481):
Chapter 10 Appendix A. Reactions and Rate Coefficients in Low?Temperature PECVD of Carbon Nanostructures (pages 483โ490):
Chapter 11 Appendix B. Why Plasma?based Nanoassembly: Further Reasons (pages 491โ498):