Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.<br> The author has worked with numerous R&D institutions around the world, and here he begins with an intro
Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly
✍ Scribed by Ostrikov K., Xu Sh.
- Publisher
- Wiley-VCH
- Year
- 2007
- Tongue
- English
- Leaves
- 316
- Category
- Library
No coin nor oath required. For personal study only.
✦ Synopsis
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.
✦ Subjects
Специальные дисциплины;Наноматериалы и нанотехнологии;Технологии получения наноматериалов и наноструктур;
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