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Plasma ion assisted deposition of aluminium oxide and aluminium oxifluoride layers for applications in the ultraviolet spectral range

✍ Scribed by O. Stenzel; D. Gäbler; S. Wilbrandt; N. Kaiser; H. Steffen; A. Ohl


Book ID
113832067
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
589 KB
Volume
33
Category
Article
ISSN
0925-3467

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