✦ LIBER ✦
Control of bonded-hydrogen in plasma-deposited silicon nitrides: Combined plasma-assisted deposition and rapid thermal annealing for the formation of device-quality nitride layers for applications in multilayer dielectrics
✍ Scribed by Z. Lu; S.S. He; Y. Ma; G. Lucovsky
- Book ID
- 115990383
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 424 KB
- Volume
- 187
- Category
- Article
- ISSN
- 0022-3093
No coin nor oath required. For personal study only.