Plasma-induced arcs in an RF-discharge
✍ Scribed by K. Höthker; W. Bieger; H. Hartwig; E. Hintz; K. Koizlik
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 808 KB
- Volume
- 93-94
- Category
- Article
- ISSN
- 0022-3115
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