✦ LIBER ✦

Plasma filament ion source for high current implanter

✍ Scribed by E. Yabe; N. Ishizaka; T. Shibuya; A. Tonegawa; K. Takayama; R. Fukui; K. Takagi; R. Kikuchi; K. Okamoto; S. Komiya

No coin nor oath required. For personal study only.

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