✦ LIBER ✦

Plasma etching of titanium disilicide

✍ Scribed by G. Tomkins; M.H. Davis; P.J. Rosser

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 966 KB
Volume: 34
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(84)90082-4

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterisation of titanium disilicide

Characterisation of titanium disilicide thin films

✍ A. Šatka; J. Liday; R. Srnánek; A. Vincze; D. Donoval; J. Kováč; M. Veselý; M. M 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 961 KB

Development of a titanium plasma etch pr

Development of a titanium plasma etch process for uncooled titanium nanobolometer fabrication

✍ Stephen F. Gilmartin; Khalil Arshak; Dave Bain; William A. Lane; Damian Collins; 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 322 KB

Diffusion of elements implanted in amorp

Diffusion of elements implanted in amorphous titanium disilicide

✍ F.M. d'Heurle; J. Cotte; P. Gas; G. Göltz; C. Stanis; O. Thomas 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 1016 KB

Formation of titanium disilicide using d

Formation of titanium disilicide using different annealing methods

✍ F. Richter; E. Bugiel; R. Grötzschel; H. Reichardt; A. Schöpke; E. Wieser; F. Wo 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 335 KB

Identification of titanium disilicide th

Identification of titanium disilicide thin films by SIMS

✍ SL Antonov; VI Belevsky; IV Gusev; AA Orlikovsky; KA Valiev; AG Vasiliev 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 142 KB

The thermal etching of titanium

✍ P. Evans 📂 Article 📅 1957 🏛 Elsevier Science ⚖ 568 KB

Fm. 1. Luder's line bending due to surface imperfections. Msg. 4 x Direction of propagation Fm. 2. Luder's line temporarily stopped by surface imperfection. Msg. 4 x Direction of propapat,ion 4 ACTA METALLURGICA, VOL. 5, l!J57 FIQ. 3. x 1000. Enlarged x 4.