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Development of a titanium plasma etch process for uncooled titanium nanobolometer fabrication

✍ Scribed by Stephen F. Gilmartin; Khalil Arshak; Dave Bain; William A. Lane; Damian Collins; Arousian Arshak; Brendan McCarthy; Simon B. Newcomb; Michelle Walsh

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 322 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.02.009

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