Plasma-enhanced doping of manganese in zinc sulfide layers during metalorganic chemical vapor deposition

✍ Scribed by Takashi Yasuda; Kazuhiko Hara; Masashi Mizuta; Hiroshi Kukimoto

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 288 KB
• Volume: 96
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(89)90659-3