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Plasma deposition of cubic boron nitride films from non-toxic material at low temperatures

✍ Scribed by M.Z. Karim; D.C. Cameron; M.J. Murphy; M.S.J. Hashmi

Book ID: 103631506
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 612 KB
Volume: 49
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(91)90093-c

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