Plasma-deposited fluoropolymer film mask for local porous silicon formation

✍ Scribed by Thomas Defforge, Marie Capelle, François Tran-Van, Gaël Gautier

• Book ID: 119905981
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 311 KB
• Volume: 7
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276x-7-344