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Plasma asymmetric dipole antenna excited by a surface wave

✍ Scribed by E. N. Istomin; D. M. Karfidov; I. M. Minaev; A. A. Rukhadze; V. P. Tarakanov; K. F. Sergeichev; A. Yu. Trefilov


Book ID
111442749
Publisher
SP MAIK Nauka/Interperiodica
Year
2006
Tongue
English
Weight
366 KB
Volume
32
Category
Article
ISSN
1063-780X

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The structure of waves in a microwave-excited plasma reactor using the multi-slotted planar (MSP) antenna is investigated by experimental measurements and numerical analyses. As a result, it is shown that the radial mode number is fixed and equals to 5 in a wide range of the plasma density, and mode