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Plasma-assisted SiC oxidation for power device fabrication

✍ Scribed by P. Mandracci; S. Ferrero; S. Porro; C. Ricciardi; G. Richieri; L. Scaltrito

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
114 KB
Volume
238
Category
Article
ISSN
0169-4332

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