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Plasma-assisted low-pressure metalorganic chemical vapor deposition of GaN on GaAs substrates

✍ Scribed by Sato, Michio

Book ID: 120474172
Publisher: American Institute of Physics
Year: 1995
Tongue: English
Weight: 578 KB
Volume: 78
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.360193

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