Plasma activated physical vapour deposition (PAPVD) by hollow cathode arc (HCA)

✍ Scribed by A. Lunk

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 279 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)94146-h