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Planarization optimization of RF-MEMS switches with a gold membrane

✍ Scribed by Villeneuve, C; Pons, P; Puyal, V; Plana, R

Book ID: 121459351
Publisher: Institute of Physics
Year: 2010
Tongue: English
Weight: 667 KB
Volume: 20
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/20/6/064013

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