𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Planarization by transformation

✍ Scribed by van Lier, M.; Otten, R.

Book ID
114614541
Publisher
Institute of Electrical and Electronics Engineers
Year
1973
Tongue
English
Weight
346 KB
Volume
20
Category
Article
ISSN
0018-9324

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Planar impedance transformer
Planar impedance transformer
✍ Jaisson, D. πŸ“‚ Article πŸ“… 1999 πŸ› IEEE 🌐 English βš– 104 KB
InfinitesimalF-planar transformations
InfinitesimalF-planar transformations
✍ I. Hinterleitner; J. MikeΕ‘; J. StrΓ‘nskΓ‘ πŸ“‚ Article πŸ“… 2008 πŸ› Allerton Press, Inc. 🌐 English βš– 554 KB
SiLK dielectric planarization by chemica
SiLK dielectric planarization by chemical mechanical polishing
✍ F KΓΌchenmeister; U Schubert; C Wenzel πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 619 KB

As the feature size of integrated circuits is driven to smaller dimensions the importance of the inter-and intralayer isolator capacitance in future metallization schemes becomes more pronounced. Organic polymers with low dielectric constants are one class of material choice for the replacement of S